Micro-Structured Glass Elements

Microstructured Optical coating

IMT specialises in microstructuring and combining dielectric coatings with metal or electrically conductive coatings.

Pinhole arrays & spatial filters

Used for spatial filtering and act as virtual point light sources in many optical systems.

Substrate: Fused silica, B270, Borofloat, D263, other materials on request
Thickness: 0.3 mm–10 mm
Coating material: Chrome, IMTBC
Pinhole diameter: > 2 µm
Pinhole diameter tolerance: ±0.5 µm
Position accuracy: < ±0.5 µm
Optical density of the metal structure: > 3

Optical gratings

Area: 5 x 5 inches
Material: Quartz, B270, N-BK7, D263, Borofloat, Zerodur
Thickness: 0.3 mm–10 mm
Structure size: > 150 nm
Amplitude or phase gratings

calibration standards

Calibration plates and dummy chips are important tools for the calibration of optical measurement systems in pick-and-place machines. With their help, the user conducts a machine capability analysis at specified time intervals to determine whether the actual position of the electronic components to be positioned differs from the target position.

Encoder discs

The position information is read out via a ‘Gray code’. In contrast to incremental discs (impulse discs), each value of the Gray code is assigned an absolute position.

In impulse discs, the change in angle during rotation of a periodic structure is measured using light-dark transitions (impulses). The system requires a reference point when starting for precise positioning tasks.

photomasks

Used mainly in wafer steppers (mask projection lithography) or in the mask aligner (masked ion beam lithography) for the production of integrated circuits (microchips).

IMT produce masks between 9 x 9 and 24 x 32 inches and use the technique to produce masks for the mask aligner.